The resonating beam is fixed at both ends, called anchor that is why called fixedfixed resonator. Design, electrostatic and eigen frequency analysis of. Effective numerical models of thermoelastic damping and anchor loss in micromechanical resonators created in comsol software, 0901200908312010, 2009, proceedings of 2009 nsf engineering research and innovation conference, honolulu, hawaii, june 2225, 2009. Comsol recently released a mems module for its femlab simulation software. Bulk acoustic wave baw resonators can be used as narrow band filters in radiofrequency applications. Simulation software for analyzing acoustics and vibrations. Watch this video to learn how the mems module addon to comsol multiphysics provides tools which make the simulation of mems devices easy. Quite strong dependence of ring resonator radius on waveguide width is revealed. Sitime offers both khz frequency and mhz frequency resonators with very high q, very small size 0. If you work with microelectromechanical systems mems, integrating the various physics is a key concern. Each of the simulated devices was 200um long, 50um wide, and 2um thick. Multiphysics modeling of mems devices november 20 executive summary power is increased with dedicated tools. In the comsol multiphysics software any number of physics can be combined in one and the same simulation. On the mechanical behavior of a wide tunable capacitive.
Analysis and study of quality factor for simple fixed beam mems. The difference between the measurement and the analysis result decreases within 10%. Modelling of different mems pressure sensors using comsol. Temperature dependence of quality factor in mems resonators.
Calculation of the helmholtz resonator using comsol in an acoustic lecture y. This archived webinar shows you that by designing mems. The purpose of this project was to use comsol, an advanced fem finite element modeling software, to analyze a coupled thermal resonator. Paper also presents the simulation results of comsol multiphysics, which were used to evaluate pull in voltage, q factor, resonant frequency and thermo elastic. This paper presents a fixedfixed beam mems resonator. Numerical approaches to modeling of wgm resonator and waveguide coupling.
Dunec about emerging mems applications that he thought had promising prospects for growth over the next few years. Several modes of the comsol software could be used to map the vibration and energy losses. To test your mems devices performance and reliability before manufacturing, you can simulate your design using multiphysics software. In this paper we provide 3d fullvector static electromagnetic simulation of silicon microring resonator operating.
If you want to import mechanical cad models, you can do so by using the cad import module or one of the livelink products for cad. Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave saw resonators with qs in the range of 10e310e6, are widely used to implement highq oscillators and band pass filters in the radio frequency rf and intermediate frequency if stages of. The proposed structure of rf mems resonator is based on a bridge with two meander self. Comsols multiphysics offers options, flexibility to mems. To model a mems device, you first define the geometry in the software, either by using the native modeling tools of comsol, or by importing a cad model. Mems technology was used to realize the worlds smallest size resonator with very low esr characteristics that is currently unachievable by quartz crystal resonators. First in section 2, the design process of a coupled mems interdigitated electrode resonator with important dimensions. An acoustic energy harvester using helmholtz resonator with piezoelectric circular diaphragm has been studied using comsol multiphysics. Zhili hao, gene hou, darrin young, and christopher wright. Calculation of the helmholtz resonator using comsol in an. Pdf 3d simulation of silicon microring resonator with comsol. The design and simulation of different pressure sensors such as capacitive, piezoelectric and piezoresistive mems pressure sensors are also proposed in this paper. The mems module provides a dedicated physics interface for electromechanics that, for mems resonators, is used to compute the variation of the resonant frequency with applied dc bias the frequency decreases with applied potential, due to the softening of the coupled electromechanical system. You can use the specialized features to visualize acoustic fields and build virtual prototypes of devices or.
The frequency of saw resonator can be given by the formula given below. Expertise mems resonator simulating a mems resonator is important in the production for the semiconductor industry. The periodic solutions in the vicinity of primary resonance are determined by means of shooting method and their stability is investigated by determining the so. Nov 25, 2017 in this work a very accurate process for modeling a microdisk resonator is presented and the dynamic behavior of the resonator is investigated. John dunec, the manager of the companys palo alto branch, about comsol current offerings in the mems area and its plans for the future. The entire model is simulated through various domains of physics like electronics, structure mechanics and fluid mechanics. This project focused on improving the design and model of the resonator to improve simulation results and evaluating the. Design of mems oscillator for high frequency application. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The acoustics module is an addon to the comsol multiphysics software that provides tools for modeling acoustics and vibrations for applications such as speakers, mobile devices, microphones, mufflers, sensors, sonar, and flow meters. Mems simulation and modeling with comsol multiphysics.
Transducers, solidstate sens actuators microsyst, 12th international conference, pp 841846. This model shows how to compute the sparameter for a piezoelectric mems device by extending the tutorial thinfilm baw composite resonator. In this paper, to study the entire working of the rheological device, simulations were done in parts using various comsol physics in comsol multiphysics software. The mems module is made for simulating multiple interacting physical effects enabling high fidelity modeling of even the most complex mems devices. Modeling and analysis of mems disk resonators springerlink. Oct 15, 2014 here are the first 40 mode shapes of a combdriven folded flexure micromechanical resonator structure as determined using finite element analysis software coventor.
This content is presented at fem workshop organized by epfl in omt etn workshop series. Design and simulation of mems helmholtz resonator for acoustic. Tunable mems capacitor for arpita das1, amrita nandy 1,2,3,4,5 national mems design centre,department of electronics and abstract. Microelectromechanical resonators for radio frequency. Muratas mems resonators achieves excellent frequency accuracy and stable temperature characteristics without the use of active elements to correct the initial frequency and. In fruitful computational research work have designing the three dimensional structure done by comsol multiphysics software. How can i add mass on a mems resonator in comsol software. Fabrication and modeling of piezoelectric rf mems resonators. The electromechanics physics interface has been upgraded to a fully formed. Mems resonator for rf applications comsol multiphysics. Design of capacitance based on interdigitated electrode. Further improvements include an array of new physics features and options as well as new postprocessing tools. This archived webinar shows you that by designing mems devices with numerical simulation, you can achieve the highest possible performance.
The analysis in this tutorial follows closely to landau 2 but the presentation has been slightly modernized. Antkowiak b, gorman j, varghese m, carter d, duwel a 2003 design of a highq, lowimpedance, ghzrange piezoelectric mems resonator. In order to validate the theoretical analysis, the results are compared with simulation results obtained by comsol software. We present the design of tunable capacitor based on mems simulated using comsol multiphysics, which is an emerging engineering software environment used for modelling and simulation of any physical based structure. Multiphysics modelling and experimental validation of.
Static and dynamic mechanical behaviors of electrostatic mems. Modeling and simulation of mechanically coupled mems. Mems simulation and modeling with comsol multiphysics software. Mechanical behavior simulation of memsbased cantilever beam. When you expand comsol multiphysics with the rf module, you can access features for specialized rf and microwave modeling, in addition to the core functionality of the comsol multiphysics software platform. I am trying to design an ultrasensitive biosensor based on coupled microelectromechanical systems resonator array. Mems resonators sitimes silicon mems resonators provide the unique ability to be embedded onto an soc and provide size, power, and easeofdesign advantages compared to discrete ceramic xtals. Thermoelastic damping, which arises when you subject a material to cyclic stress, is an important factor when designing mems resonators. In this project, comsol multiphysics and solidworks are employed to model and simulate a pair of mechanically coupled mems resonators with a. Design verification of mems resonators with fem simulator. Mems pressure sensors have widely used in automotive, biomedical and industrial applications.
The 3d resonator structure was created in solidworks, exported as a parasolid, and then imported into comsol multiphysics. In this paper, fixedfixed beam resonator is modeled by comsol multiphysics software. The comsol discussion forum covers a wide variety of simulation topics. Comsol tutorial for dispersion engineering in microring resonators. Mems software for microelectromechanical systems simulation. Design of piezoelectric aluminum nitride mems resonator ravi patni, mohit joshi, sameer mehra, and akhilesh mohan. Surface acoustic waves based mems resonator comsol. In this paper, fixedfixed beam resonator is modeled by comsol multi physics software. The stress brings about deformation, where materials heat under compressive stress and cool under tensile stress. Numerical approaches to modeling of wgm resonator and waveguide coupling n. The mems resonator is designed on siliconon insulator soi. The cyclic deformation of the resonator creates local. Kondratiev 1, 1 russian quantum center rqc, skolkovo, moscow, russia.
It is shown that sidewall sloping degrades resonator efficiency and. Mems module application gallery examples comsol multiphysics. Here are the first 40 mode shapes of a combdriven folded flexure micromechanical resonator structure as determined using finite element analysis software coventor. You are also more than welcome to send off a quick question to us and find out more. Using the minimization of the hamiltonian, the governing equation of the motion is derived. Design of high sensitivity and fast response mems capacitive humidity sensor using comsol multiphysics r. This paper presents the studies of mechanical behavior of mems cantilever beam. The effect of section change on the mechanical properties is studied analytically and. For users of the mems module, comsol multiphysics version 5. I referred to the tutorial given in mems module for resonator pull in voltage calculation and tried to simulate a switch. We show that geometrical and scalar approaches are not sufficiently accurate for calculating resonator parameters. Simulation eines elektrostatisch angeregten memsresonators. Micro electromechanical systems mems devices switches, resonators.
The microelectromechanical system mems resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. The electrostatic actuation mechanism for the electrostatic and. At first, a mechanical analysis is performed by comsol 3. The frequency response of the resonator is achieved using the lindstedtpoincare perturbation technique. On the mechanical behavior of a wide tunable capacitive mems. Nov 08, 2017 comsol tutorial for dispersion engineering in microring resonators. Thermoelastic damping is an important factor when designing mems resonators. This sensor is made of an alloy consisting of two materials with different coefficients. I am trying to design an ultrasensitive biosensor based on coupled microelectromechanical. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly.
Browse the threads and share your ideas with the comsol community. Furthermore, this example may also be defined and modeled using components from the following product combinations. Test out how it can work for you by attending a free handson workshop where a complimentary trial of comsol multiphysics and its modules will be made available for you. An electrostatically actuated mems resonator is simulated in the time and frequency domains. Vibrational mode shapes of a mems resonator youtube. The mems module is made for simulating multiple interacting physical effects enabling high fidelity modeling of. Design of high sensitivity and fast response mems capacitive. Modeling software for rf, microwave, and millimeter. Comsol is the perfect tool for simulating mems and piezoelectric devices and applications.
Analysis using comsol multiphysics the structure was built in 3d builder of the comsol multiphysics ver. This paper presents the design and simulation of a thermal sensor using comsol multiphysics software for the detection of low body temperature syndrome which can allow the early detection of cancer. The resonating beam is fixed at both end, called anchor that is why called fixedfixed resonator. Thus, due to the resulting heat flux, energy is lost to bring about this damping. Numerical approaches to modeling of wgm resonator and. Design of piezoelectric aluminum nitride mems resonator. Design, electrostatic and eigen frequency analysis of fixed.
A lot of modes of vibration can be found in a rectangular plate. Modelling of different mems pressure sensors using. Department of electronics and communication engineering, periyar maniammai university, vallam, thanjavur 64. This coupled thermal resonator was previously constructed in ledit, but when analyzed in comsol, it produced undesirable results. Comsol multiphysics for mems applications yeswanth rao comsol, inc. The upper end is limited by the resonator power handling capacity which, as well see shortly, is limited by nonlinear effects. The long beams connecting the two resonators have tethers attached to drive the device. Due to the complexity of a thermally driven resonator, a prescribed displacement was applied in the simulation. Modeling and simulation of ted effect on various resonators are done by using comsol multiphysics software.
Surface acoustic wave can be generated by application of a voltage to an idt deposited on the surface of a piezoelectric substrate. In each case, the softwares direct parametric linear, frequency response solver was used. When loads are random in nature, such as turbulent wind gusts or roadinduced vibrations on a vehicle, it is not possible to. Mi 2, 1 department of electronic engineering, college of engineering, shibaura institute of technology, koto, tokyo, japan. The effect of thermoelastic damping on the total qfactor of stateof. A novel structure for design and simulation of a mems. Unlike quartz, mems resonators can be miniaturized and flattened to better address the formfactor needed for handheld wireless devices and automotive applications.
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